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RESEARCH

From Flow Physics
to Analysis and Prediction.

Three themes connect engineering applications, flow physics, and the numerical and analytical methods used to understand them.

Application Case Study

An et al., IJPEM (2026), Fig. 6(a): time-averaged slurry film thickness for the P67/H67/Q350 case. DOI: 10.1007/s12541-026-01524-6.

CMP PROCESS CFD

CFD of CMP Processes

We analyze unsteady multiphase flow and slurry distribution around the wafer in a 300 mm CMP system as rotation speed and slurry flow rate vary.

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